SOLUTIONS

SMARTrun2run


Fab Wide Run2Run System

  • Fully integrated into all SMART Applications
  • Customizable controllers
  • Supports flexible Analysis Models for Litho
  • Wafer and lot based controllers
  • Metrology history with visualization
  • Enhanced grouping function supports low volume high product mix
  • Proprietary feed back loop
  • Controller based reset function
  • Unique feed forward control
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SMARTrun2run