SOLUTIONS

SMARToverlay


On- and Offline overlay analysis


  • Mix and match (Tools, Lines, Products) handles measurement data of all tool vendors
  • Available as standalone application and fully integrated to support Run2Run
  • Supports any Parameter Model (not tool specific and user enhancements)
  • Wafer and field visualizations
  • Wafer and lot level analyses
  • Allows user defined analysis steps
  • Calculates yield prediction for current layer
  • Supports target separation
  • Client - Server architecture
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SMARToverlay