SOLUTIONS

SMARTdefect


Defect PlugIn with import functions

  • Import Defect files
        Reading of standard formats wafer based and mask based
        Reading ADI-files
  • Visualizations
        Filter by error class
        Visualize defects on wafer/field
        Analysis for systematic defects
        Wafer and lot level visualizations
  • Combined reticle and wafer defect analysis
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SMARTdefect