SOLUTIONS

SMARTcd


On- and Offline CD analysis


  • Mix and match (Tool, product)
  • Calculates CD correction and dose correction
  • Gradient Calculation based on production lots
  • Multiple visualization methods
  • FDC capabilities
  • Wafer and lot level analyses
  • Calculates yield prediction for current layer
  • Rule based setup
  • Allows user defined analysis steps
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SMARTcd